Methods for producing low oxygen silicon ingots

ABSTRACT

An method for producing a silicon ingot includes melting polycrystalline silicon in a crucible enclosed in a vacuum chamber to form a melt, generating a cusped magnetic field within the vacuum chamber, dipping a seed crystal into the melt, withdrawing the seed crystal from the melt to pull a single crystal that forms the silicon ingot, wherein the silicon ingot has a diameter greater than about 150 millimeters (mm), and simultaneously regulating a plurality of process parameters such that the silicon ingot has an oxygen concentration less than about 5 parts per million atoms (ppma). The plurality of process parameters include a wall temperature of the crucible, a transport of silicon monoxide (SiO) from the crucible to the single crystal, and an evaporation rate of SiO from the melt.

CROSS-REFERENCE TO RELATED APPLICATION

This application claims priority to International Application No.PCT/US2014/039164 filed on May 22, 2014, and U.S. Provisional PatentApplication No. 61/827,393 filed on May 24, 2013, the entire disclosuresof which are hereby incorporated by reference in their entirety.

FIELD

This disclosure generally relates to silicon ingots, and morespecifically, to producing silicon ingots having a low oxygenconcentration.

BACKGROUND

Single crystal silicon is the starting material in many processes forfabricating semiconductor electronic components and solar materials. Forexample, semiconductor wafers produced from silicon ingots are commonlyused in the production of integrated circuit chips on which circuitry isprinted. In the solar industry, single crystal silicon may be usedinstead of multicrystalline silicon due to the absence of grainboundaries and dislocations.

To produce the semiconductor or solar wafers, a single crystal siliconingot may be produced by melting polycrystalline silicon in a crucibleand solidifying it again for a direction solidification process, ordipping a seed crystal into the molten silicon, withdrawing the seedcrystal in a manner sufficient to achieve the diameter desired for theingot, and growing the ingot at that diameter for Czochralski process.For a continuous single crystal silicon process, the method is similarto that of a batch process except the polysilicon is fed and meltedsimultaneously with crystal growth. The silicon ingot is then machinedinto a desired shape from which the semiconductor or solar wafers can beproduced.

During the process, oxygen is introduced into silicon crystal ingotsthrough a melt-solid or melt crystal interface. The oxygen may causevarious defects in wafers produced from the ingots, reducing the yieldof semiconductor devices fabricated using the ingots. For example,insulated-gate bipolar transistors (IGBTs), high quality radio-frequency(RF), high resistivity silicon on insulator (HR-SOI), and charge traplayer SOI (CTL-SOI) applications typically require a low oxygenconcentration in order to achieve high resistivity and to avoidformation of P-N junctions.

Due to the relatively low Oi, such wafers may have relatively weakmechanical strength and relatively poor slip performance at hightemperature anneal/ramp that may be requested by a device manufacturer.The mechanical strength and slip performance of low Oi wafers may beimproved by co-doping them with nitrogen or carbon.

At least some known methods use float zone materials to achieve a lowoxygen concentration and high resistivity. However, float zone materialsare relatively expensive and are limited to use in producing ingotshaving a diameter less than about 200 mm. Accordingly, these knownmethods are unable to produce higher diameter silicon crystal ingotswith a relatively low oxygen concentration.

This Background section is intended to introduce the reader to variousaspects of art that may be related to various aspects of the presentdisclosure, which are described and/or claimed below. This discussion isbelieved to be helpful in providing the reader with backgroundinformation to facilitate a better understanding of the various aspectsof the present disclosure. Accordingly, it should be understood thatthese statements are to be read in this light, and not as admissions ofprior art.

BRIEF SUMMARY

One aspect is a method for producing a silicon ingot. The methodincludes melting polycrystalline silicon in a crucible enclosed in avacuum chamber to form a melt, generating a cusped magnetic field withinthe vacuum chamber, dipping a seed crystal into the melt, withdrawingthe seed crystal from the melt to pull a single crystal that forms thesilicon ingot, wherein the silicon ingot has a diameter greater thanabout 150 millimeters (mm), and simultaneously regulating a plurality ofprocess parameters such that the silicon ingot has an oxygenconcentration less than about 5 parts per million atoms (ppma). Theplurality of process parameters include a wall temperature of thecrucible, a transport of silicon monoxide (SiO) from the crucible to thesingle crystal, and an evaporation rate of SiO from the melt.

Various refinements exist of the features noted in relation to theabove-mentioned aspect. Further features may also be incorporated in theabove-mentioned aspect as well. These refinements and additionalfeatures may exist individually or in any combination. For instance,various features discussed below in relation to any of the illustratedembodiments may be incorporated into the above-described aspect, aloneor in any combination.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a top view of a crucible of one embodiment.

FIG. 2 is a side view of the crucible and a cylindrical coordinatesystem shown in FIG. 1.

FIG. 3 is a schematic diagram illustrating a cusped magnetic fieldapplied to a crucible containing a melt in a crystal growing apparatus.

FIG. 4 is a block diagram of a crystal growing system of one embodiment.

FIG. 5 is graph plotting a crucible wall temperature for differentsettings of a bottom heater.

FIG. 6 is a graph plotting a bottom heater power versus an oxygenconcentration.

FIGS. 7A and 7B are graphs plotting a crucible rotation rate versus anoxygen concentration.

FIG. 8A is a graph showing a magnetic field strength at a crystal and amelt.

FIG. 8B is a graph plotting a magnetic field strength versus an oxygenconcentration.

FIG. 9 is graph plotting a crucible wall temperature for different meltto reflector gap values.

FIG. 10 is a graph plotting an inert gas flow rate versus an oxygenconcentration.

FIG. 11 is a graph plotting a seed rotation rate versus an oxygenconcentration.

FIG. 12 is a graph plotting a cusp position versus an oxygenconcentration.

Like reference symbols in the various drawings indicate like elements.

DETAILED DESCRIPTION

Referring initially to FIGS. 1 and 2, a crucible of one embodiment isindicated generally at 10. A cylindrical coordinate system for crucible10 includes a radial direction R 12, an angular direction θ 14, and anaxial direction Z 16. Coordinates R 12, θ 14, and Z 16 are used hereinto describe methods and systems for producing low oxygen silicon ingots.

FIG. 3 is a block diagram illustrating a cusped magnetic field beingapplied to a crucible 23 containing a melt 25 in a crystal growingapparatus. As shown, crucible 23 contains silicon melt 25 from which acrystal 27 is grown. The cusped magnetic field configuration is designedto overcome deficiencies of axial and horizontal magnetic fieldconfigurations. A pair of coils 31 and 33 (e.g., Helmholtz coils) areplaced coaxially above and below a melt surface 36. Coils 31 and 33 areoperated in an opposed current mode to generate a magnetic field thathas a purely radial field component (i.e., along R 12) near melt surface36 and a purely axial field component (i.e., along Z 16) near a center38 of melt 25. The combination of an upper magnetic field 40 and a lowermagnetic field 42 produced by coils 31 and 33, respectively, results inaxial and radial cusped magnetic field components.

FIG. 4 is a block diagram of a crystal growing system 100. System 100employs a Czochralski crystal growth method to produce a semiconductoringot. In this embodiment, system 100 is configured to produce acylindrical semiconductor ingot having a diameter of greater thanone-hundred fifty millimeters (150 mm), more specifically in a rangefrom approximately 150 mm to 460 mm, and even more specifically, adiameter of approximately three-hundred millimeters (300 mm). In otherembodiments, system 100 is configured to produce a semiconductor ingothaving a two-hundred millimeter (200 mm) diameter or a four-hundred andfifty millimeter (450 mm) diameter. In general, the crystal growingsystem 100 includes a vacuum chamber 101 enclosing a crucible 103. Aside heater 105, for example, a resistance heater, surrounds crucible103. A bottom heater 106, for example, a resistance heater, ispositioned below crucible 103. During heating and crystal pulling, acrucible drive unit 107 (e.g., a motor) rotates crucible 103, forexample, in the clockwise direction as indicated by the arrow. Crucibledrive unit 107 may also raise and/or lower crucible 103 as desiredduring the growth process. Within crucible 103 is a silicon melt 109having a melt level or melt line 111. In operation, system 100 pulls asingle crystal 113, starting with a seed crystal 115 attached to a pullshaft or cable 117, from melt 109. One end of pull shaft or cable 117 isconnected by way of a pulley (not shown) to a drum (not shown), or anyother suitable type of lifting mechanism, for example, a shaft, and theother end is connected to a chuck (not shown) that holds seed crystal115 and crystal 113 grown from seed crystal 115.

Crucible 103 and single crystal 113 have a common axis of symmetry 119.Crucible drive unit 107 can raise crucible 103 along axis 119 as themelt 109 is depleted to maintain melt level 111 at a desired height. Acrystal drive unit 121 similarly rotates pull shaft or cable 117 in adirection opposite the direction in which crucible drive unit 107rotates crucible 103 (e.g., counter-rotation). In embodiments usingiso-rotation, crystal drive unit 121 may rotate pull shaft or cable 117in the same direction in which crucible drive unit 107 rotates crucible103 (e.g., in the clockwise direction). Iso-rotation may also bereferred to as a co-rotation. In addition, crystal drive unit 121 raisesand lowers crystal 113 relative to melt level 111 as desired during thegrowth process.

According to the Czochralski single crystal growth process, a quantityof polycrystalline silicon, or polysilicon, is charged to crucible 103.A heater power supply 123 energizes resistance heaters 105 and 106, andinsulation 125 lines the inner wall of vacuum chamber 101. A gas supply127 (e.g., a bottle) feeds argon gas to vacuum chamber 101 via a gasflow controller 129 as a vacuum pump 131 removes gas from vacuum chamber101. An outer chamber 133, which is fed with cooling water from areservoir 135, surrounds vacuum chamber 101.

The cooling water is then drained to a cooling water return manifold137. Typically, a temperature sensor such as a photocell 139 (orpyrometer) measures the temperature of melt 109 at its surface, and adiameter transducer 141 measures a diameter of single crystal 113. Acontrol unit 143 may include a processor 144 that processes the signalsgenerated by photocell 139 and diameter transducer 141. Control unit 143may be a programmed digital or analog computer that controls crucibledrive unit 107, crystal drive unit 121, heater power supply 123, vacuumpump 131, and gas flow controller 129 (e.g., an argon flow controller).The term processor, as used herein, refers to central processing units,microprocessors, microcontrollers, reduced instruction set circuits(RISC), application specific integrated circuits (ASIC), logic circuits,and any other circuit or processor capable of executing the functionsdescribed herein. In this embodiment, system 100 does not include anupper heater. The presence of an upper heater, or lack of an upperheater, alters cooling characteristics of crystal 113.

In this embodiment, an upper magnet, such as a solenoid coil 145, and alower magnet, such as a solenoid coil 147, may be located above andbelow, respectively, melt level 111. In this embodiment, the coils 145and 147, shown in cross-section, surround vacuum chamber 101 and shareaxes with axis of symmetry 119. In some embodiments, the upper and lowercoils 145 and 147 have separate power supplies, namely, an upper coilpower supply 149 and a lower coil power supply 151, each of which isconnected to and controlled by control unit 143.

In this embodiment, current flows in opposite directions in the twosolenoid coils 145 and 147 to produce a magnetic field. A reservoir 153provides cooling water to the upper and lower coils 145 and 147 beforedraining via cooling water return manifold 137. A ferrous shield 155surrounds coils 145 and 147 to reduce stray magnetic fields and toenhance the strength of the field produced.

In this embodiment, system 100 produces silicon crystal ingots suitablefor use in device manufacturing. Advantageously, system 100 may be usedto produce silicon crystal 113, a substantial portion or all of which issubstantially free of agglomerated intrinsic point defects. Furthermore,system 100 may be used to produce crystal 113 having substantially noagglomerated defects that are larger than about one hundred twentynanometers (nm) in diameter, or more particularly, about ninety nm indiameter. The shape of the melt-solid or melt-crystal interface and thepull speed is controlled during crystal growth to limit and/or suppressthe formation of agglomerated intrinsic point defects.

During production, oxygen is introduced into silicon crystal ingotsthrough the melt-solid or melt crystal interface. However, oxygen maycause various defects in wafers produced from the ingots, reducing theyield of semiconductor devices. Accordingly, it is desirable to producesilicon crystal ingots with a low oxygen concentration. Using themethods described herein, silicon crystal ingots are produced having anoxygen concentration less than about 15 ppma, less than about 8 ppma, oreven less than about 5 ppma.

In this embodiment, three process parameters are regulatedsimultaneously to facilitate producing silicon crystal ingots with a lowoxygen concentration. Specifically, a wall temperature of crucible 103,a flow (i.e., transport) of silicon monoxide (SiO) from crucible 103 tosingle crystal 113, and an evaporation of SiO from melt 109 arecontrolled. The wall temperature of crucible 103 corresponds to adissolution rate of crucible 103. Specifically, the higher the walltemperature of crucible 103, the faster that portions of crucible 103will react with and dissolve into melt 109, generating SiO andincreasing an oxygen concentration of crystal 113. Accordingly, reducingthe wall temperature of crucible 103, as used herein, equates toreducing the dissolution rate of crucible 103.

By reducing the wall temperature of crucible 103 (i.e., reducing thedissolution rate of crucible 103), reducing the flow (i.e., transport)of SiO from crucible 103 to single crystal 113, and increasing anevaporation of SiO from melt 109, the oxygen concentration of crystal113 can be reduced. To regulate the three process parameters, aplurality of conditions are controlled. Each condition affects at leastone of the three process parameters. In this embodiment, the controlledconditions are heater power, crucible rotation, magnet strength, seedlift, melt to reflector gap, inert gas flow, inert gas pressure, seedrotation, and cusp position. Each condition is described in detailherein.

Heater power refers to the power of side and bottom heaters 105 and 106.Specifically, relative to typical heating configurations, by increasinga power of side heater 105 and reducing a power of bottom heater 106, ahot spot on the wall of crucible 103 is raised close to the melt line111. As the wall temperature of crucible 103 at or below melt line 111is lower, the amount of SiO generated by melt 109 reacting with crucible103 is also lower. The heater power configuration also impacts melt flowby reducing the flow (i.e., transport) of SiO from crucible 103 tosingle crystal 113. In this embodiment, a power of bottom heater 106 isapproximately 0 to 5 kilowatts, and more specifically approximately 0kilowatts, and a power of side heater 105 is in a range fromapproximately 100 to 125 kilowatts. Variations in the power of sideheater 105 may be due to, for example, variation in a hot zone age frompuller to puller.

FIG. 5 is a graph showing a modeled prediction of the wall temperaturefor crucible 103 for two different settings of bottom heater 106. Thegraph indicates that below melt line 111 (e.g., at a melt depth ofapproximately 0.11 meters), a power setting of 0 kilowatts (BHO) resultsin a lower temperature at the interface between melt 109 and crucible103 than a power setting of 30 kilowatts (BH30). FIG. 6 is a graphshowing a modeled prediction of the power of bottom heater 106 versusthe oxygen concentration. As shown in the graph, the oxygenconcentration is lower at a power setting of 0 kilowatts as compared toa power setting of 30 kilowatts.

Crucible rotation refers to the rate at which crucible 103 is rotatedabout axis 119 using crucible drive unit 107. Crucible rotation impactsthe flow of SiO from crucible 103 to crystal 113 and an amount of SiOevaporating from melt 109. A high crucible rotation reduces both aboundary layer thickness between crucible 103 and melt 109, and alsoreduces a boundary layer thickness between melt line 111 and the gasabove melt 109. However, to minimize the oxygen concentration in crystal113, a thicker boundary layer between crucible 103 and melt 109 isdesired to reduce the SiO transport rate, while a thinner boundary layerbetween melt line 111 and the gas above melt 109 is desired to increasethe SiO evaporation rate. Accordingly, the crucible rotation is selectedto balance the competing interests of a high boundary layer thicknessbetween crucible 103 and melt 109 and a low boundary layer thicknessbetween melt line 111 and the gas above melt 109.

FIGS. 7A and 7B are graphs showing crucible rotation in revolutions perminute (rpm) versus the oxygen concentration. As shown in the graphs,the oxygen concentration is lowest at approximately 1.7 rpm.Accordingly, in this embodiment, the crucible rotation is in a rangefrom approximately 1.3 rpm to 2.2 rpm, and more specifically, thecrucible rotation is approximately 1.7 rpm.

Magnet strength refers to the strength of the cusp magnetic field. Morespecifically, a current through coils 145 and 147 is controlled.Magnetic strength impacts the flow of SiO from crucible 103 to crystal113. That is, a high magnetic strength minimizes the flow of SiO fromcrucible 103 to crystal 113 by suppressing a buoyancy force within melt109. FIG. 8A is a graph showing the magnetic field strength at crystal113 and melt 109. As the magnetic field suppresses the buoyancy flow, itdecreases the dissolution rate of the quartz crucible, thus lowering theinterstitial oxygen incorporated into the crystal. However, if themagnetic field strength increases beyond a certain level, furtherretardation in the buoyancy flow may result in decreasing theevaporation rate at the melt free surface, thus raising the interstitialoxygen levels.

This is the physical mechanism behind the non-monotonic response of theinterstitial oxygen to increasing cusp magnetic field strength, as shownin FIG. 8B. In this embodiment, the strength of the magnetic field isapproximately 0.02 to 0.05 Tesla (T) at an edge of crystal 113 at themelt-solid interface and approximately 0.05 to 0.12 T at the wall ofcrucible 103.

Seed lift refers to the rate at which pull shaft or cable 117 lifts seedcrystal 115 out of melt 109. Seed lift impacts the flow of SiO fromcrucible 103 to crystal 113. In this embodiment, seed crystal 115 islifted at a rate in a range of approximately 0.42 to 0.55 millimetersper minute (mm/min), and more specifically 0.46 mm/min for 300 mmproduct. This pull rate is slower than pull rates typically used forsmaller diameter (e.g., 200 mm) crystals. For example, the seed lift for200 mm product may be in a range of approximately 0.55 to 0.85 mm/min,and more specifically 0.7 mm/min.

The pull speed, along with the combination of other process parameters,facilitates controlling the defect quality of the crystal. For example,using SP2 laser light scattering, the detected agglomerated pointdefects generated by the process described herein may be less than 400count for defects less than 60 nm, less than 100 count for defectsbetween 60 and 90 nm, and less than 100 count for less defects between90 and 120 nm.

Melt to reflector gap refers to a gap between melt line 111 and a heatreflector (not shown). Melt to reflector gap impacts the walltemperature of crucible 103. Specifically, a larger melt to reflectorgap reduces the wall temperature of crucible 103. In this embodiment,the melt to reflector gap is between approximately 60 mm and 80 mm, andmore specifically 70 mm.

FIG. 9 is a graph showing a modeled prediction of the wall temperaturefor crucible 103 for two different values of the melt to reflector gap.The graph indicates that below melt line 111 (e.g., at a melt depth ofapproximately 0.2 meters), a melt to reflector gap of 70 mm (Hr70)results in a lower temperature at the interface between melt 109 andcrucible 103 than a melt to reflector gap of 60 mm (Hr60). This is dueto a change in position of crucible 103 relative to side heater 105.

Inert gas flow refers to the rate at which argon gas flows throughvacuum chamber 101. Inert gas flow impacts the SiO evaporation rate.Specifically, increasing the argon gas flow rate sweeps more SiO gasabove melt line 111 away from crystal 113, minimizing a SiO gas partialpressure, and in turn increasing SiO evaporation. However, if the flowrate is too high, crystal growth may be negatively impacted.

FIG. 10 is a graph showing a modeled prediction of the gas flow rate instandard liters per minute (slpm) versus oxygen concentration. The graphindicates that increasing gas flow rate reduces oxygen concentration. Inthis embodiment, the argon gas flow rate is in a range fromapproximately 100 slpm to 150 slpm.

Inert gas pressure refers to the pressure of the argon gas flowingthrough vacuum chamber 101. Inert gas pressure impacts the SiOevaporation rate. Specifically, decreasing the argon gas pressureincreases SiO evaporation and hence decreases SiO concentration in melt109. In this embodiment, the argon gas pressure is in a range fromapproximately 10 torr to 30 torr.

Seed rotation refers to the rate at which pull shaft or cable 117rotates seed crystal 115 about axis 119. Seed rotation impacts the flowof SiO from crucible 103 to crystal 113 and a rate of SiO evaporationfrom melt 109. A high seed rotation reduces the boundary layer thicknessbetween melt line 111 and the gas above melt 109 to increase SiOevaporation. Further, a high seed rotation decreases melt flow fromcrucible 103 to crystal 113 by suppressing a buoyancy force. Moreover, ahigh seed rotation creates an outward radial flow that retards theinward flow (i.e., transport) of SiO from crucible 103, reducing theoxygen concentration.

FIG. 11 is a graph showing a modeled prediction of the seed rotationrate in revolutions per minute (rpm) versus oxygen concentration. Thegraph indicates that increasing the seed rotation rate reduces oxygenconcentration. Although the modeled prediction shows a relatively smallimpact of seed rotation on oxygen concentration, actual experimentalresults have demonstrated a significant reduction in oxygenconcentration as the seed rotation rate is increased. In thisembodiment, the seed rotation rate is in a range from approximately 8 to14 rpm, and more specifically 12 rpm.

Cusp position refers to the position of the cusp of the magnetic fieldgenerated by coils 145 and 147. Cusp position impacts the walltemperature of crucible 103 and the flow of SiO from crucible 103 tocrystal 113. More specifically, maintaining the cusp position below meltline 111 facilitates reducing the oxygen concentration.

FIG. 12 is a graph showing a modeled prediction of the cusp position inmm below melt line 111 versus oxygen concentration. The graph indicatesthat lowering the cusp position further below melt line 111 reducesoxygen concentration. In this embodiment, the cusp position is set in arange from approximately 10 mm to 40 mm below melt line 111, morespecifically, in a range of approximately 25 mm to 35 mm below melt line111, and even more specifically, at approximately 30 mm.

By controlling conditions (i.e., heater power, crucible rotation, magnetstrength, seed lift, melt to reflector gap, inert gas flow, inert gaspressure, seed rotation, and cusp position), a plurality of processparameters (i.e., a wall temperature of a crucible, a flow of SiO fromthe crucible to a single crystal, and an evaporation of SiO from a melt)are regulated to produce silicon ingots having a low oxygenconcentration. For example, the methods described herein facilitateproducing a 300 mm silicon ingot with an oxygen concentration less that5 ppma.

Wafers sliced from the silicon ingots formed using the systems andmethods described herein may be utilized in a variety of applications.For example, insulated-gate bipolar transistors (IGBTs), high qualityradio-frequency (RF), high resistivity silicon on insulator (HR-SOI),and charge trap layer SOI (CTL-SOI) applications typically require a lowoxygen concentration in order to achieve high resistivity and to avoidformation of p-n junctions. Accordingly, wafers produced for IGBTapplications using the methods described herein may have 30 to 300ohm-centimeter (ohm-cm) N-type resistivity or greater than 750 ohm-cmN/P-type resistivity. Further, wafers produced for RF, HR-SOI, and/orCTL-SOI applicants using the methods described herein may be greaterthan 750 ohm-cm P-type product. In some embodiments the wafers producedare utilized as handle wafers.

For P-type wafers produced using the methods described herein, boron,aluminum, germanium, and/or indium may be used has a majority carrier,and red phosphorus, phosphorus, arsenic, and/or antimony may be used asa minority carrier. For N-type wafers produced using the methodsdescribed herein, red phosphorus, phosphorus, arsenic, and/or antimonymay be used as the majority carrier, and boron, aluminum, germanium,and/or indium may be used as the minority carrier.

Due to the relatively low Oi, to improve mechanical strength and slipperformance, wafers produced using the methods described herein may beco-doped (e.g., by doping the single crystal that forms the ingot) withnitrogen or carbon. For example, the nitrogen concentration may bevaried between 0 to 8e15 atoms per cubic centimeter, and the carbonconcentration may be varied between 0.0 to 2.0 ppma.

Embodiments of the methods described herein achieve superior resultscompared to prior methods and systems. For example, the methodsdescribed herein facilitate producing silicon ingots with a lower oxygenconcentration than at least some known methods. Further, unlike at leastsome known methods, the methods described herein may be used for theproduction of ingots having a diameter greater than 150 mm.

When introducing elements of the present invention or the embodiment(s)thereof, the articles “a”, “an”, “the” and “said” are intended to meanthat there are one or more of the elements. The terms “comprising”,“including” and “having” are intended to be inclusive and mean thatthere may be additional elements other than the listed elements.

As various changes could be made in the above without departing from thescope of the invention, it is intended that all matter contained in theabove description and shown in the accompanying drawings shall beinterpreted as illustrative and not in a limiting sense.

What is claimed is:
 1. A method for producing a silicon ingot, themethod comprising: melting polycrystalline silicon in a crucibleenclosed in a vacuum chamber to form a melt; generating a cuspedmagnetic field within the vacuum chamber; dipping a seed crystal intothe melt; withdrawing the seed crystal from the melt to pull a singlecrystal that forms the silicon ingot, wherein the silicon ingot has adiameter greater than about 150 millimeters (mm); and simultaneouslyregulating a plurality of process parameters such that the silicon ingothas an oxygen concentration less than about 5 parts per million atoms(ppma), wherein the plurality of process parameters include a walltemperature of the crucible, a transport of silicon monoxide (SiO) fromthe crucible to the single crystal, and an evaporation rate of SiO fromthe melt, wherein one of said process parameters comprises operating aheater positioned below the crucible at a power range from approximately0 to 5 kilowatts.
 2. A method in accordance with claim 1, wherein thesilicon ingot has a diameter in a range from approximately 150 mm to 460mm.
 3. A method in accordance with claim 1, wherein the silicon ingothas a diameter of approximately 300 mm.
 4. A method in accordance withclaim 1, wherein simultaneously regulating a plurality of processparameters comprises operating a heater positioned below the crucible ata power of approximately 0 kilowatts.
 5. A method in accordance withclaim 1, wherein simultaneously regulating a plurality of processparameters comprises rotating the crucible at a rate in a range fromapproximately 1.3 rpm to 2.2 rpm.
 6. A method in accordance with claim1, wherein simultaneously regulating a plurality of process parameterscomprises rotating the crucible at a rate of approximately 1.7 rpm.
 7. Amethod in accordance with claim 1, wherein generating a cusped magneticfield comprises generating a cusped magnetic field having a magneticfield strength in a range from approximately 0.02 to 0.05 Tesla at anedge of the single crystal at a melt-solid interface, and having amagnetic field strength in a range from approximately 0.05 to 0.12 Teslaat a wall of the crucible.
 8. A method in accordance with claim 1,wherein the silicon ingot has a diameter of approximately 300 mm, andwherein simultaneously regulating a plurality of process parameterscomprises withdrawing the seed crystal at a rate in a range fromapproximately 0.42 mm per minute to 0.55 mm per minute.
 9. A method inaccordance with claim 1, wherein the silicon ingot has a diameter ofapproximately 300 mm, and wherein simultaneously regulating a pluralityof process parameters comprises withdrawing the seed crystal at a rateof approximately 0.46 mm per minute.
 10. A method in accordance withclaim 1, wherein the silicon ingot has a diameter of approximately 200mm, and wherein simultaneously regulating a plurality of processparameters comprises withdrawing the seed crystal at a rate in a rangefrom approximately 0.55 mm per minute to 0.85 mm per minute.
 11. Amethod in accordance with claim 1, wherein the silicon ingot has adiameter of approximately 200 mm, and wherein simultaneously regulatinga plurality of process parameters comprises withdrawing the seed crystalat a rate of approximately 0.7 mm per minute.
 12. A method for producinga silicon ingot, the method comprising: melting polycrystalline siliconin a crucible enclosed in a vacuum chamber to form a melt; generating acusped magnetic field within the vacuum chamber; dipping a seed crystalinto the melt withdrawing the seed crystal from the melt to pull asingle crystal that forms the silicon ingot, wherein the silicon ingothas a diameter greater than about 150 millimeters (mm); andsimultaneously regulating a plurality of process parameters such thatthe silicon ingot has an oxygen concentration less than about 5 partsper million atoms (ppma), wherein the plurality of process parametersinclude a wall temperature of the crucible, a transport of siliconmonoxide (SiO) from the crucible to the single crystal, and anevaporation rate of SiO from the melt; wherein simultaneously regulatinga plurality of process parameters comprises maintaining a melt toreflector gap in a range from approximately 60 mm to 80 mm.
 13. A methodin accordance with claim 1, wherein simultaneously regulating aplurality of process parameters comprises maintaining a melt toreflector gap of approximately 70 mm.
 14. A method in accordance withclaim 1, wherein simultaneously regulating a plurality of processparameters comprises flowing argon gas through the vacuum chamber at aflow rate in a range from approximately 100 standard liters per minute(slpm) to 150 slpm.
 15. A method in accordance with claim 1, whereinsimultaneously regulating a plurality of process parameters comprisesflowing argon gas through the vacuum chamber at a pressure in a rangefrom approximately 10 torr to 30 torr.
 16. A method in accordance withclaim 1, wherein simultaneously regulating a plurality of processparameters comprises rotating the seed crystal at a rate in a range fromapproximately 8 rpm to 14 rpm.
 17. A method in accordance with claim 1,wherein simultaneously regulating a plurality of process parameterscomprises rotating the seed crystal at a rate of approximately 12 rpm.18. A method for producing a silicon ingot, the method comprising:melting polycrystalline silicon in a crucible enclosed in a vacuumchamber to form a melt; generating a cusped magnetic field within thevacuum chamber; dipping a seed crystal into the melt withdrawing theseed crystal from the melt to pull a single crystal that forms thesilicon ingot, wherein the silicon ingot has a diameter greater thanabout 150 millimeters (mm); and simultaneously regulating a plurality ofprocess parameters such that the silicon ingot has an oxygenconcentration less than about 5 parts per million atoms (ppma), whereinthe plurality of process parameters include a wall temperature of thecrucible, a transport of silicon monoxide (SiO) from the crucible to thesingle crystal, and an evaporation rate of SiO from the melt; whereinsimultaneously regulating a plurality of process parameters comprisespositioning a cusp of the generated magnetic field in a range fromapproximately 10 mm to 40 mm below a surface of the melt.
 19. A methodin accordance with claim 1, wherein simultaneously regulating aplurality of process parameters comprises positioning a cusp of thegenerated magnetic field approximately 30 mm below a surface of themelt.
 20. A method in accordance with claim 1, further comprisingmeasuring agglomerated point defects of the silicon ingot using laserlight.
 21. A method in accordance with claim 20, wherein the measureddefects include less than 400 defects having a size less than 60 nm,less than 100 defects having a size between 60 and 90 nm, and less than100 defects having a size between 90 and 120 nm.
 22. A method inaccordance with claim 1, further comprising doping the single crystalwith one of nitrogen and carbon.
 23. A method in accordance with claim22, wherein doping the single crystal comprises doping the singlecrystal with nitrogen such that a nitrogen concentration is within arange from 0 atoms per cubic centimeter to 8e15 atoms per cubiccentimeter.
 24. A method in accordance with claim 22, wherein doping thesingle crystal comprises doping the single crystal with carbon such thata carbon concentration is within a range from 0.0 to 2.0 ppma.
 25. Awafer generated from a silicon ingot that is produced using the methodof claim
 1. 26. A wafer in accordance with claim 25, wherein the waferhas 30 ohm-cm to 300 ohm-centimeter N-type resistivity such that thewafer is suitable for use in IGBT applications.
 27. A wafer inaccordance with claim 25, wherein the wafer has greater than 750 ohm-cmN/P-type resistivity such that the wafer is suitable for use in IGBTapplications.
 28. A wafer in accordance with claim 25, wherein the waferhas greater than 750 ohm-cm P-type resistivity such that the wafer issuitable for use in RF, HR-SOI, and CTL-SOI applications.
 29. A wafer inaccordance with claim 25, wherein the wafer is a handle wafer.
 30. Awafer in accordance with claim 25, wherein the wafer is a P-type producthaving at least one of boron, aluminum, germanium, and indium as amajority carrier, and having at least one of red phosphorus, phosphorus,arsenic, and antimony as a minority carrier.
 31. A wafer in accordancewith claim 25, wherein the wafer is a N-type product having at least onered phosphorus, phosphorus, arsenic, and antimony as a majority carrier,and having at least one of boron, aluminum, germanium, and indium as aminority carrier.
 32. The method in accordance with claim 12, furthercomprising doping the single crystal with one of nitrogen and carbon.33. The method in accordance with claim 18, further comprising dopingthe single crystal with one of nitrogen and carbon.
 34. A wafergenerated from a silicon ingot that is produced using the method ofclaim
 12. 35. A wafer generated from a silicon ingot that is producedusing the method of claim 18.